bulk micromachining meaning in English
体细微加工
Examples
- This dissertation introduces the technique of bulk micromachining , and explains the fabrication process of this optical - switch on emphases
本论文在阐述了常用的微机械加工工艺的基础上，重点介绍了这种微机械光开关的制作过程。 - The capacitive accelerometers fabricated by bulk micromachining process have large sensitive mass , small noise and high resolution compared to the ones fabricated by surface micromachining process
用表面微机械制作的电容式传感器，其敏感质量较小、热机械噪声大、分辨率不摘要高。 - . 5 . the samples with characteristic impedances of 120 and 50 have been fabricated through the surface micromachining and bulk micromachining . stress relaxation has been considered carefully through designing and fabricating , to obtain the structures with the lowest stress
利用混合腐蚀工艺制备了v型槽mems共平面波导，其中特性阻抗为50的传输线采用体硅加工技术实现，而120传输线则采用表面微机械加工技术实现。 - Focusing on a tuning fork vibratory gyroscope fabricated through silicon bulk micromachining , the matrix perturbation technology in the random finite element method was introduced to analyze the statistical characteristics of the natural frequencies and output capacitance of tuning fork vibratory gyroscope
摘要以一种通过体微机械加工技术制备的音叉振动式微机械陀螺为对象，基于随机摄动技术定量计算了微陀螺固有频率变异和检测输出电容变异的统计特征，以概率思想表达了微陀螺批量加工过程所带来的材料尺寸随机误差对其性能的影响。 - This paper is one part of the uestc ’ s assignment ? ? “ the design and research of mimu ” 。 by the research for mems and the mems acceleration sensor , this assignment will finish a series of mimu system , which will be applied to the rocket and the missile guided system . this thesis mainly include following facets : research the mature mems processing technic at the present , develop a type of capacitive acceleration sensor which structure is simple and based on a set of new silicon bulk micromachining process
本论文来自电子科技大学机械电子工程学院的课题“ mems惯性组合的设计与研究” 。该课题希望通过对mems技术和mems惯性传感器的研究,研制和设计出一系列能够应用于火箭和导弹制导的mimu系统。主要进行了一下工作:研究了目前较为成熟的mems加工工艺,提出了一种结构简单,基于各向异性体硅微加工技术的电容式加速度传感器。